| Features |
In this system, a wafer is mounted to a ceramic carrier plate to polish the wafer, and then an automated series of cleaning, heating, wafer mounting, vacuum pressing and cooling is performed. |
Applications/
Implementation Results |
Semiconductor manufacturers |
| Keywords |
Wafer mounter, semiconductor, wafer, C/P transfer, C/P cleaning, C/P heating, C/P cooler, vacuum press, automatic wafer mounting system |
| Related Divisions |
Advanced Equipment Division |
| Contact |
Currently Limited to Domestic Businesses |
| Reference Information |
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