| Features |
This unit cleans the polishing pad on the polishing machine of slurry and other waste. This extends the useful life of the polishing pad and improves the reclaim efficiency. |
Applications/
Implementation Results |
Semiconductor manufacturers |
| Keywords |
Polisher, polishing pad, semiconductor, wafer, auto dresser, automatic wafer mounting system |
| Related Divisions |
Advanced Equipment Division |
| Contact |
Currently Limited to Domestic Businesses |
| Reference Information |
- |
Home
